China’s nanofilm pressure sensors have now joined the world’s leading ranks.
2020-08-19
In recent years, Sensor Nobleman Company has achieved numerous breakthroughs in the research and development of nanofilm pressure sensor technology as well as in product manufacturing. The overall performance of these film-based pressure sensors has reached world-class advanced levels, with some key indicators even attaining cutting-edge standards. Without any compensation measures, the sensors’ comprehensive accuracy—comprising repeatability error, hysteresis error, and linearity error—exceeds 0.1% of full-scale range (FS). The zero-point temperature drift can be as low as 0.0007% FS/℃ at best. The calibration results for these products are shown in Figure 1. The operating temperatures of these products can reach 150℃, 200℃, 250℃, and even 380℃. Moreover, the long-term stability of the products is no greater than 0.1% FS per year, and the bridge arm resistance is not less than 5 kΩ.
Figure 1: Calibration Results of the Thin-Film Pressure Sensor
To achieve the above performance indicators, the product incorporates several proprietary technologies:
(1) Special metallic elastomer technology. This specialized elastomer material overcomes the shortcomings of conventional elastomers used in existing pressure sensors, featuring a low Young’s modulus, high-temperature resistance, corrosion resistance, and large elastic strain capability.
(2) New component alloy sensing material technology with an ultra-low temperature coefficient—using NiCr metallic materials with special compositions, these materials can operate stably for long periods at high temperatures up to 400℃, with a daily TCR ≤ 2 ppm/℃.
(3) Design and preparation technologies for nano-functional thin films. Using a vacuum nanofilm preparation system developed in-house, we fabricate high-quality functional thin films, passivation layers, transition layers, and protective layers at the nanoscale, thereby ensuring the comprehensive performance of pressure sensors. Thanks to the enormous surface area and enhanced reactivity of nanoparticles, as well as the toughening and crack-resistant effects at the nanofilm interface, these nano-thin films exhibit significantly improved density and adhesion. The atomic bonding at the interface enhances fatigue resistance, minimizes sensor creep and hysteresis, and markedly improves the sensor’s static characteristics. Moreover, the films offer excellent thermal conductivity, enhancing the sensor’s temperature performance; they also have fewer pinholes, thus improving their insulating properties. As a result, these film-based pressure sensors combine outstanding features such as high precision, high stability, high operating temperature, and exceptional resistance to harsh environmental conditions.
Thanks to breakthroughs in the above-mentioned key technologies, the overall performance indicators of the nanofilm pressure sensor have been significantly improved, bringing its overall performance up to world-leading levels. This high-performance film pressure sensor can be widely applied in various industries and fields, including aerospace, weapons systems, petrochemicals, metallurgy, machinery, power generation, nuclear industry, and transportation.
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