Comparison of Performance Among Different Sensitive Materials for Pressure Sensors
2020-08-19
The strain-sensitive materials commonly used in pressure sensors include single-crystal silicon, polycrystalline silicon, or multi-component metallic materials such as NiCr alloys. The composition of NiCr alloy sensitive materials can be optimized according to the specific application environment or requirements of the sensor. For instance, if a very low temperature coefficient of resistance is required, appropriate elements can be added to reduce temperature drift at high or low temperatures and ensure humidity stability.
The modified NiCr sensing material developed by Sensor Nobleman Company boasts a resistance temperature coefficient of less than 0.0002%. When used to fabricate thin-film pressure sensors, these sensors exhibit a zero-point temperature coefficient at 150℃ without requiring any compensation; their calibrated result is 0.0002%FS/℃—a performance that other types of pressure sensors simply cannot achieve. A comparison of the performance characteristics of single-crystal silicon/polycrystalline silicon and the NiCr sensing material was conducted by German scholars in their book "Automotive Pressure Sensors," as shown in Table 1.
As shown in Table 1, single-crystal silicon/polycrystalline silicon exhibits certain advantages over NiCr-sensitive materials, particularly in terms of temperature dependence and stability. The Swiss company Trafag conducted long-term comparative tests on the stability of pressure sensors made from different types of sensitive materials, as illustrated in Figure 1 below. The test results also confirm that NiCr-sensitive-material thin-film pressure sensors demonstrate superior stability.
Table 1: Performance Comparison of Single-Crystal Silicon/Polycrystalline Silicon vs. NiCr Alloy Sensing Materials
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