![[Patent Introduction] A Small-Volume High-Temperature Pressure Transmitter](https://omo-oss-image.thefastimg.com/portal-saas/pg2025091817033563166/cms/image/288749da-cf97-4b1e-bcdb-5e10e42a0f32.jpg "[Patent Introduction] A Small-Volume High-Temperature Pressure Transmitter")
2020-08-26
[Patent Introduction] A Small-Volume High-Temperature Pressure Transmitter
“A small-size high-temperature pressure transmitter” is an invention patent—both international and domestic—that has been applied for by Suno-Meng Technology Co., Ltd. (Application No. 2019109513119). The product features a 300℃ high-temperature nanofilm pressure sensor core developed independently by the company, and it is completed through a specially designed structural configuration. The product can operate in media temperatures up to 250℃ (with potential expansion to 350℃), boasts a combined accuracy better than 0.2%FS, and has a length of less than 40 millimeters. Its output signals are either 0.5–4.5 VDC or 4–20 mA DC. This high-performance pressure transmitter is ideally suited for applications in weapon systems such as missile propulsion systems, as well as in various civilian fields.
2020-08-22
Film Structure and Quality Requirements for Nanometer-Thick Film Pressure Sensors
The multilayer film used in nanofilm pressure sensors is fabricated using a vacuum ion-beam sputtering process. Because the thickness of the core-sensitive film is less than 100 nm, it is referred to as a nanofilm. Pressure sensors manufactured using this process are called nanofilm pressure sensors.
2020-08-19
Nanofilm technology has significantly enhanced the stability of pressure sensors.
The main performance indicators for pressure sensors include accuracy (overall accuracy), temperature characteristics, thermal influence performance, zero-point drift, long-term stability, and reliability. Long-term stability refers to the sensor's ability to regain its originally calibrated performance when recalibrated after being used for a certain period—whether stored in a warehouse or operating online. Among the calibrated performance parameters, nonlinearity errors, temperature errors, and thermal influence errors within the overall accuracy can all be corrected and compensated for using modern electronic technologies, thereby minimizing their impact on measurement accuracy. However, zero-point drift is a random error that cannot be corrected by circuitry. Even if a sensor boasts high accuracy and other excellent performance metrics, zero-point drift often renders the measurements unreliable. Given the critical importance of zero-point drift in reproducing performance specifications, stability indicators are frequently expressed as the maximum allowable zero-point drift error over a specified period under defined conditions, typically reported in units of "% FS/year."
2020-08-19
Preparation of Nanofilms and Enhancement of Performance of Nanofilm Pressure Sensors
In nanotechnology, the first observation was made using a scanning tunneling microscope, which employs an extremely sharp probe equipped with an enhanced electric field. Under the influence of this strong electric field, the probe can attract individual atoms and then move them to another location, arranging them into the desired structure. The multilayer thin films used in high-performance nanoscale pressure sensors are fabricated by a kinetic-energy-transfer method, in which individual atoms are excited and transported to new locations, where they are deposited to form nanoscale thin films. There are numerous reports from abroad on the use of kinetic-energy-transfer methods for atom relocation. For example, Professor Makoto Matsui of Japan has used NEC’s precision ion-beam equipment to fabricate tiny components with thicknesses less than 0.1 μm (micrometers) via ion-beam deposition technology. Abroad, there have also been reports on equipment developed specifically for surface micromachining in the fields of nanotechnology and nanomanufacturing—for instance, ion-beam mercury transfer and plating, molecular-beam epitaxy, and etching techniques using electron beams and light beams—all of which can be applied in these processes. Mr. Toshiyuki Takagi, a leading expert on thin films from Japan, pointed out that by leveraging ion-engineering, laser ablation, and laser-processing technologies to precisely control the orderliness of atoms and molecules, it is possible to create functional ultra-thin deposited films.
2020-08-19
The sensing element of a sputtered thin-film pressure sensor is fabricated using vacuum deposition technology. Insulating materials, sensitive strain-resistance materials, and protective materials are deposited onto an elastic stainless steel diaphragm in atomic form, forming atomic-bonded layers such as an insulating film, a resistive sensing material film, and a protective film—all integrated seamlessly with the elastic stainless steel diaphragm. Subsequently, through processes including photolithography and resistance adjustment, a robust and stable Wheatstone bridge is created on the surface of the elastic stainless steel diaphragm. When the medium under measurement exerts pressure on the elastic stainless steel diaphragm, the Wheatstone bridge mounted thereon generates an electrical signal that is proportional to the applied pressure. After amplification, adjustment, and other signal-processing steps, combined with an appropriate structural design, this device becomes a thin-film pressure sensor or thin-film pressure transmitter that can be widely used across various fields.
2020-08-19
China’s nanofilm pressure sensors have now joined the world’s leading ranks.
In recent years, Sensor Nobleman Company has achieved numerous breakthroughs in the research and development of nanofilm pressure sensor technology as well as in product manufacturing. The overall performance of these film-based pressure sensors has reached world-leading levels, with some key indicators even attaining cutting-edge global standards. Without any compensation measures, the sensors’ comprehensive accuracy (including repeatability error, hysteresis error, and linearity error) exceeds 0.1% of full scale. The best zero-point temperature drift can reach as low as 0.0007% of full scale per degree Celsius. The calibration results for these products are shown in Figure 1. The operating temperatures of these products can reach 150℃, 200℃, 250℃, and even 380℃. Moreover, the long-term stability of the products is no greater than 0.1% of full scale per year, and the bridge arm resistance is not less than 5 kΩ.
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